Thermal UV treatment on SU-8 polymer for integrated optics

Thermal UV treatment on SU-8 polymer for integrated optics

We report a simple and low-cost method to fabricate SU-8-based polymer waveguide devices. The influence of hard-baking temperature on SU-8 polymer treated with or without UV radiation was investigated in detail. Based on these properties, the straight type, Y branch type, MarchZehnder (M-Z) type and 1 × 4 splitter waveguides were successfully fabricated. And a polymeric thermal-optic (TO) switc...

Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs

Manufacturing tolerances for UV LIGA using SU-8 resist

Abstract UV LIGA involves the exposure of SU-8 negative resist, using a UV mask aligner, to produce high aspect ratio pillars or microchannels as part of the manufacturing process for microsystems. This has been made possible by the widespread use of a UV sensitive resist SU-8. Many papers have been written on the Fresnel diffraction theory of exposure, some key properties of SU-8 and prototype...

Three-dimensional SU-8 structures by reversal UV imprint

In this work, three-dimensional 3D SU-8 microand nanostructures were fabricated using a reversal UV imprint process at low temperature and low pressure. The SU-8 polymer was coated on a patterned glass mold and then transferred onto various substrates by reversal UV imprint at a typical temperature of 50 °C, pressure of 1 MPa, and UV exposure of 1 s. The lower temperature and pressure used comp...

Periodic Structures for Integrated Optics

This paper deals with the theory and device applications of periodic thin-film waveguides. Topics treated include mode solutions, optical fiiters, distributed feedback lasers (DFB), distzibuted B r a g reflector (DBR) lasers, grating couplers, and phase matching in nonlinear interactions.